MEMS (micro electro mechanical system) is a new field which has a lot of advantages: small volume, light weight, low energy consumption, fast response, big batch and low cost etc.
微型机电系统是一个新兴的技术领域，其主要优点是体积小、重量轻、能耗少、响应快、大批量、成本低等，有广泛的应用前景。
The transient characteristics of the dynamic stress of MEMS (Micro Electro Mechanical system) decides that it is hard to be measured directly by using the traditional stress measurement system.
微机电系统(MEMS)动态应力的瞬态特性决定了传统的应力测试系统无法直接满足它的测试需要。
Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for Micro Electro Mechanical System(MEMS).
介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
应用推荐